[IEEE 2004 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2004.12.7-2004.12.9)] 2004 IEEE International Conference on Semiconductor Electronics - Nitrogen effects on the sensitivity of tantalum nitride (Ta/sub x/N) for ion sensing devices
Chao-Sung Lai,, Chia-Ming Yang,, Cheng-En Lue,, Chih-Yao Wang,, Lue, T.F., Ko, H.P., Tzu-Ming Wang,Year:
2004
Language:
english
DOI:
10.1109/smelec.2004.1620893
File:
PDF, 383 KB
english, 2004