Assessment of surface profile data acquired by a stylus...

Assessment of surface profile data acquired by a stylus profilometer

Lee, Dong-Hyeok, Cho, Nahm-Gyoo
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Volume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/10/105601
Date:
October, 2012
File:
PDF, 3.08 MB
english, 2012
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