[IEEE Technical Digest. IEEE International MEMS 99...

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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Micro-actuator for tera-storage

Hirano, T., Long-Sheng Fan,, Semba, T., Lee, W.Y., John Hong,, Pattanaik, S., Webb, P., Wen-Han Juan,, Susanna Chan,
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Year:
1999
Language:
english
DOI:
10.1109/memsys.1999.746869
File:
PDF, 1.13 MB
english, 1999
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