[IEEE 2014 Conference on Precision Electromagnetic Measurements (CPEM 2014) - Rio de Janeiro, Brazil (2014.8.24-2014.8.29)] 29th Conference on Precision Electromagnetic Measurements (CPEM 2014) - Measurement of optical parameters of thin films non-uniform in thickness
Necas, David, Ohlidal, Ivan, Cudek, Vladimir, Ohlidal, Miloslav, Vodak, Jiri, Zajickova, Lenka, Majumdar, AbhijitYear:
2014
Language:
english
DOI:
10.1109/cpem.2014.6898528
File:
PDF, 187 KB
english, 2014