Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2000 Vol. 18; Iss. 6
Step and flash imprint lithography: Template surface treatment and defect analysis
Bailey, T., Choi, B. J., Colburn, M., Meissl, M., Shaya, S., Ekerdt, J. G., Sreenivasan, S. V., Willson, C. G.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1324618
File:
PDF, 952 KB
english, 2000