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Influence of filament geometry on film uniformity in a catalytic CVD system for low-temperature processing
Keum, Ki-Su, Song, Tae-Ho, Hong, Wan-ShickVolume:
15
Language:
english
Journal:
Journal of Information Display
DOI:
10.1080/15980316.2014.884021
Date:
January, 2014
File:
PDF, 799 KB
english, 2014