Electrophoretic deposition grinding (EPDG) for improving...

Journal of Micromechanics and Microengineering 2007 / 02 Vol. 17; Iss. 2

Electrophoretic deposition grinding (EPDG) for improving the precision of microholes drilled via ECDM

Yan, Biing-Hwa, Yang, Ching-Tang, Huang, Fuang-Yuan, Lu, Zhe-Hong
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/2/025
Date:
February, 2007
File:
PDF, 1002 KB
english, 2007
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