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Comparison of Ar+ Monoatomic and Cluster Ion Sputtering of Ta2O5 at Different Ion Energies, by XPS: Part 1 - Monoatomic Ions
Grilli, Rossana, Simpson, Robin, Mallinson, Christopher F., Baker, Mark A.Volume:
21
Language:
english
Journal:
Surface Science Spectra
DOI:
10.1116/11.20140701
Date:
December, 2014
File:
PDF, 901 KB
english, 2014