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Top-Down Fabrication of Ordered Mesoscopic PZT Dot Arrays by Natural Lithography
Waegner, M., Suchaneck, G., Gerlach, G.Volume:
123
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2011.570639
Date:
January, 2011
File:
PDF, 299 KB
english, 2011