Combined optical emission and resonant absorption diagnostics of an Ar-O2-Ce-reactive magnetron sputtering discharge
El Mel, A.A., Ershov, S., Britun, N., Ricard, A., Konstantinidis, S., Snyders, R.Volume:
103-104
Language:
english
Journal:
Spectrochimica Acta Part B: Atomic Spectroscopy
DOI:
10.1016/j.sab.2014.11.009
Date:
January, 2015
File:
PDF, 1.32 MB
english, 2015