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ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities
West, Jonathan, Jadhav, AmolVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/2/028
Date:
February, 2007
File:
PDF, 414 KB
english, 2007