ToF-SIMS spectra multivariate analyses for the chemical characterization of microelectronic low-k materials
Scarazzini, R., Lépinay, M., Broussous, L., Barnes, J. P., Veillerot, M., Jousseaume, V.Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5533
Date:
November, 2014
File:
PDF, 350 KB
english, 2014