[IEEE 2009 Joint Meeting of the European Frequency and Time Forum (EFTF) and the IEEE International Frequency Control Symposium (FCS) - Besancon, France (2009.04.20-2009.04.24)] 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum - Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying
Lin, Yang, Li, Wei-Chang, Bongsang Kim,, Lin, Yu-Wei, Ren, Zeying, Nguyen, Clark T.-C.Year:
2009
Language:
english
DOI:
10.1109/freq.2009.5168142
File:
PDF, 3.57 MB
english, 2009