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Reaching the Limits in Silicon Processing
Benson, Kenneth E., Kimerling, Lionel C., Panousis, Peter T.Volume:
69
Language:
english
Journal:
AT&T Technical Journal
DOI:
10.1002/j.1538-7305.1990.tb00484.x
Date:
November, 1990
File:
PDF, 7.50 MB
english, 1990