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The role of the sample shape and size on the internal stress induced curvature of thin-film substrate systems
Nathalie Guyot, Yann Harmand, André MézinVolume:
41
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.ijsolstr.2004.03.015
File:
PDF, 348 KB
english, 2004