Improved Uniformity of Resistivity Distribution in LEC...

Japanese Journal of Applied Physics 1984 / 8 Vol. 23; Iss. Part 2, No

Improved Uniformity of Resistivity Distribution in LEC Semi-Insulating GaAs Produced by Annealing

Obokata, Takeshi, Matsumura, Takao, Terashima, Kazutaka, Orito, Fumio, Kikuta, Toshio, Fukuda, Tsuguo
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Volume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.23.l602
Date:
August, 1984
File:
PDF, 1.06 MB
1984
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