Mechanism of MOCVD Growth for GaAs and AlAs
Takahashi, Yasuhito, Soga, Tetsuo, Sakai, Shiro, Umeno, Masayoshi, Hattori, ShuzoVolume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.709
Date:
June, 1984
File:
PDF, 676 KB
1984