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Transparent and Conductive ZnO Thin Films Prepared by Atmospheric-Pressure Chemical Vapor Deposition Using Zinc Acetylacetonate
Minami, Tadatsugu, Sonohara, Hideo, Takata, Shinzo, Sato, HirotoshiVolume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L743
Date:
May, 1994
File:
PDF, 750 KB
1994