STUDY ON ELECTRICAL PROPERTIES OF FLATTENED MOCVD PZT FILM...

Integrated Ferroelectrics 2005 / 10 Vol. 75; Iss. 1

STUDY ON ELECTRICAL PROPERTIES OF FLATTENED MOCVD PZT FILM BY CMP PROCESS

CHOI, S. H., BAE, B. J., SON, Y. H., LIM, J. E., YOO, D. C., IM, D. H., HEO, J. E., NAM, S. D., PARK, J. H., HONG, C. K., CHO, H. K., MOON, J. T.
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Volume:
75
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580500414549
Date:
October, 2005
File:
PDF, 3.01 MB
english, 2005
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