Low coherent Linnik interferometer optimized for use in...

Measurement Science and Technology 2012 / 12 Vol. 23; Iss. 12

Low coherent Linnik interferometer optimized for use in nano-measuring machines

Niehues, Jan, Lehmann, Peter, Xie, Weichang
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Volume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/12/125002
Date:
December, 2012
File:
PDF, 1.85 MB
english, 2012
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