Low-Leakage Epitaxial PZT Thin Films Grown on Ir/MgO Substrates by Metalorganic Chemical Vapor Deposition
Oikawa, T., Takahashi, K., Ishida, J., Ichikawa, Y., Ochiai, T., Saito, K., Sawabe, A., Funakubo, H.Volume:
46
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215390
Date:
January, 2002
File:
PDF, 576 KB
english, 2002