Numerical Analysis of the Transport Phenomena in MOCVD...

Japanese Journal of Applied Physics 1985 / 5 Vol. 24; Iss. Part 1, No

Numerical Analysis of the Transport Phenomena in MOCVD Process

Kusumoto, Yoshiro, Hayashi, Toshiro, Komiya, Souji
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.620
Date:
May, 1985
File:
PDF, 799 KB
1985
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