Measurement of the adhesion and removal forces of submicrometer particles on silicon substrates
Busnaina, Ahmed, Taylor, Jack, Kashkoush, IsmailVolume:
7
Language:
english
Journal:
Journal of Adhesion Science and Technology
DOI:
10.1163/156856193X00321
Date:
January, 1993
File:
PDF, 799 KB
english, 1993