Selective Epitaxial Growth of GaAs by Metalorganic Chemical...

Japanese Journal of Applied Physics 1985 / 12 Vol. 24; Iss. Part 1, No

Selective Epitaxial Growth of GaAs by Metalorganic Chemical Vapor Deposition

Yamaguchi, Ko-ichi, Okamoto, Kotaro, Imai, Tetsuji
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1666
Date:
December, 1985
File:
PDF, 2.26 MB
1985
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