Two-dimensional numerical simulation of radio frequency...

Journal of Applied Physics 2009 Vol. 106; Iss. 8

Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistors

Fung, Tze-Ching, Chuang, Chiao-Shun, Chen, Charlene, Abe, Katsumi, Cottle, Robert, Townsend, Mark, Kumomi, Hideya, Kanicki, Jerzy
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Volume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3234400
File:
PDF, 1.55 MB
english, 2009
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