Characterization and Surface Cleaning Technique for MOCVD...

Characterization and Surface Cleaning Technique for MOCVD Growth-Interrupted GaAs Films

Sugiura, Hideo, Asai, Hiromitsu
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1493
Date:
November, 1985
File:
PDF, 730 KB
1985
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