Nondestructive and Noncontact Observation of Microdefects...

Japanese Journal of Applied Physics 1985 / 11 Vol. 24; Iss. Part 2, No

Nondestructive and Noncontact Observation of Microdefects in GaAs Wafers with a New Photo-Thermal-Radiation Microscope

Nakamura, Hiromichi, Tsubouchi, Kazuo, Mikoshiba, Nobuo, Fukuda, Tsuguo
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.24.l876
Date:
November, 1985
File:
PDF, 1.25 MB
1985
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