Synthesis and optical properties of BCxNy films deposited from N-triethylborazine and hydrogen mixture
Sulyaeva, Veronica S., Rumyantsev, Yurii M., Kesler, Valerii G., Kosinova, Marina L.Volume:
581
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.12.002
Date:
April, 2015
File:
PDF, 1.36 MB
english, 2015