Fabrication of suspended piezoelectric microresonators

Integrated Ferroelectrics 1999 / 08 Vol. 24; Iss. 1-4

Fabrication of suspended piezoelectric microresonators

Piekarski, B., Dubey, M., Devoe, D., Zakar, E., Zeto, R., Conrad, J., Piekarz, R., Ervin, M.
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Volume:
24
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589908215587
Date:
August, 1999
File:
PDF, 935 KB
english, 1999
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