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Split sputter mode: a novel sputtering method for flat-panel display manufacturing
Pieralisi, Fabio, Hanika, Markus, Scheer, Evelyn, Bender, MarcusVolume:
12
Language:
english
Journal:
Journal of Information Display
DOI:
10.1080/15980316.2011.569168
Date:
June, 2011
File:
PDF, 589 KB
english, 2011