Study of lithography profiles developed on non-planar Si surfaces
Sirakoulis, G Ch, Karafyllidis, I, Sirakoulis, G Ch, Mardiris, V, Thanailakis, AVolume:
10
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/10/4/311
Date:
December, 1999
File:
PDF, 292 KB
english, 1999