Ar+ ion milling of InSb for manufacturing single electron devices
H. Simchi, M. Raastgoo, A. Ranjbar, T. Barzekar, M. Qasempour, M. Daaraei, E. Mahmoodzadeh, M.H. Saani, Sh. MohammadnejadVolume:
52
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.infrared.2009.04.001
File:
PDF, 645 KB
english, 2009