GENETIC ALGORITHM BASED SEMICONDUCTOR MANUFACTURING PROCESS...

Journal of the Chinese Institute of Industrial Engineers 2003 / 01 Vol. 20; Iss. 6

GENETIC ALGORITHM BASED SEMICONDUCTOR MANUFACTURING PROCESS CONTROLLER FOR CHEMICAL MECHANICAL PLANARIZATION

Yeh, Jinn-Yi, Huang, Bau-Hsien
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Volume:
20
Language:
english
Journal:
Journal of the Chinese Institute of Industrial Engineers
DOI:
10.1080/10170660309509265
Date:
January, 2003
File:
PDF, 275 KB
english, 2003
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