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Hybrid ultrasonic elastic force motors micromachined in silicon
Racine, G.-A., Luthier, R., Luginbuhl, P., Brooks, K., Setter, N., de Rooij, N. F.Volume:
8
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589508012297
Date:
March, 1995
File:
PDF, 590 KB
english, 1995