Adhesion force measurement between the stamp and the resin...

Nanotechnology 2009 / 02 Vol. 20; Iss. 5

Adhesion force measurement between the stamp and the resin in ultraviolet nanoimprint lithography—an investigative approach

Perumal, Jayakumar, Yoon, Tae Ho, Jang, Hwan Soo, Lee, Jae Jong, Kim, Dong Pyo
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Volume:
20
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/20/5/055704
Date:
February, 2009
File:
PDF, 880 KB
english, 2009
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