A New Non-Contact Method to Measure Temperature of the...

Japanese Journal of Applied Physics 1986 / 11 Vol. 25; Iss. Part 2, No

A New Non-Contact Method to Measure Temperature of the Surface of Semiconductor Wafers

Tomita, Takashi, Kinosada, Toshiaki, Yamashita, Tatuya, Shiota, Masahiro, Sakurai, Takeshi
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Volume:
25
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.25.L925
Date:
November, 1986
File:
PDF, 492 KB
1986
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