High- Q micromechanical resonators for mass sensing in dissipative media
Tappura, Kirsi, Pekko, Panu, Seppä, HeikkiVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/6/065002
Date:
June, 2011
File:
PDF, 690 KB
english, 2011