Optical characterization of fully programmable MEMS...

Optical characterization of fully programmable MEMS diffraction gratings

Zamkotsian, F., Timotijevic, B., Lockhart, R., Stanley, R. P., Lanzoni, P., Luetzelschwab, M., Canonica, M., Noell, W., Tormen, M.
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Volume:
20
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.20.025267
Date:
November, 2012
File:
PDF, 1.82 MB
english, 2012
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