Crystalline-Structural Evaluations of Cubic AlN Thin Films Heteroepitaxially Grown on Sapphire (0001) by Pulsed Laser Deposition
Ueda, Yūtaro, Daio, Takeshi, Yoshida, Tomohiro, Akamine, Hiroshi, Tominaga, Aki, Okajima, Toshihiro, Yoshitake, TsuyoshiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.08JE03
Date:
August, 2013
File:
PDF, 650 KB
english, 2013