Nanomechanical and nanotribological characterization of a...

Analog Integrated Circuits and Signal Processing 2015 / 3 Vol. 82; Iss. 3

Nanomechanical and nanotribological characterization of a MEMS micromembrane supported by two folded hinges

Pustan, Marius, Dudescu, Cristian, Birleanu, Corina
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Volume:
82
Language:
english
Journal:
Analog Integrated Circuits and Signal Processing
DOI:
10.1007/s10470-014-0482-y
Date:
March, 2015
File:
PDF, 1.86 MB
english, 2015
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