IR laser-induced co-decomposition of trisilane and thiirane for deposition of polycarbosilthiane films
Josef Pola, Markéta Urbanová, Magna Santos, Luis Díaz, Jan ŠubrtVolume:
81
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.jaap.2007.11.008
File:
PDF, 737 KB
english, 2008