Electron cyclotron resonance plasma source by using Ku-band...

Electron cyclotron resonance plasma source by using Ku-band traveling-wave tube amplifier for broad ion-beam processing

T. Asaji, H. Sasaki, Y. Kato, F. Sato, T. Iida, J. Saito
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Volume:
77
Year:
2006
Language:
english
DOI:
10.1063/1.2148883
File:
PDF, 478 KB
english, 2006
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