Mass-Spectrometric Monitoring of the Thermally Induced Decomposition of Trimethylgallium, Tris(tert-Butyl)Gallium, and Triethylantimony at Low Pressure Conditions
Naoufal Bahlawane, Frank Reilmann, Linda-Christin Salameh, Katharina Kohse-HöinghausVolume:
19
Language:
english
Pages:
8
DOI:
10.1016/j.jasms.2008.04.015
Date:
July, 2008
File:
PDF, 315 KB
english, 2008