![](/img/cover-not-exists.png)
Colloid aspects of chemical–mechanical planarization
E. Matijević, S.V. BabuVolume:
320
Year:
2008
Language:
english
Pages:
19
DOI:
10.1016/j.jcis.2007.11.057
File:
PDF, 2.69 MB
english, 2008