Novel phosphate-functionalized silica-based dispersions for...

Journal of Colloid and Interface Science 2010 Vol. 348; Iss. 1

Novel phosphate-functionalized silica-based dispersions for selectively polishing silicon nitride over silicon dioxide and polysilicon films

P.R. Veera Dandu, Naresh K. Penta, B.C. Peethala, S.V. Babu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
348
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.jcis.2010.04.034
File:
PDF, 367 KB
english, 2010
Conversion to is in progress
Conversion to is failed