Preparation of MgO Thin Films by RF Magnetron Sputtering

Japanese Journal of Applied Physics 1991 / 5 Vol. 30; Iss. Part 1, No

Preparation of MgO Thin Films by RF Magnetron Sputtering

Kaneko, Yasuhisa, Mikoshiba, Nobuo, Yamashita, Tsutomu
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Volume:
30
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.30.1091
Date:
May, 1991
File:
PDF, 381 KB
1991
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