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In situ reflectance monitoring of the growth and etching of AlAs/GaAs structures in MOVPE
A Rebey, M.M Habchi, A Bchetnia, B El JaniVolume:
261
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.jcrysgro.2003.09.042
File:
PDF, 582 KB
english, 2004