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Fast and non-destructive assessment of epitaxial quality of polycrystalline silicon films on glass by optical measurements
Axel Straub, Per I. Widenborg, Alistair Sproul, Yidan Huang, Nils-Peter Harder, Armin G. AberleVolume:
265
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2004.01.046
File:
PDF, 266 KB
english, 2004