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Electron beam induced deposition of rhodium from the precursor [RhCl(PF3)2]2: morphology, structure and chemical composition
F. Cicoira, K. Leifer, P. Hoffmann, I. Utke, B. Dwir, D. Laub, P.A. Buffat, E. Kapon, P. DoppeltVolume:
265
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.jcrysgro.2004.02.006
File:
PDF, 498 KB
english, 2004