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Hafnium oxoneopentoxide as a new MOCVD precursor for hafnium oxide films
A Abrutis, L.G Hubert-Pfalzgraf, S.V Pasko, A Bartasyte, F Weiss, V JanickisVolume:
267
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.jcrysgro.2004.04.012
File:
PDF, 356 KB
english, 2004